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Spectroscopic Ellipsometry

The elliptical spectroscopy is applied in countless fields, from semiconductor physics to microelectronics, medicine and biology, from basic research to industrial applications. LaNN is equipped with a J.A. Woollam Vase (Variable Angle Spectroscopic Ellipsometer), for reflection and transmission analysis. It is an accurate and versatile ellipsometer for research on all types of materials: semiconductors, dielectrics, polymers, metals, multi-layers and more. It combines high accuracy and precision with a wide spectral range: from 193 to 3200nm. Wavelength variability and incidence angle allow flexibility in measuring capacities, including:

  • Ellipsometry in reflection and transmission
  • Ellipsometry for anisotropy, delay, birefringence
  • R / T cross-polarized
  • Mueller-matrix

Viale del Lavoro, 6
36030 Monte di Malo
Vicenza, Italy
T +39 0445 605838
F +39 0445 581430
C.F./P.I. 01650050246