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Soft lithography replica techniques

Soft lithography is a family of techniques for rapidly replicating structures using elastomeric stamps, molds and conformable photomasks. It is called "soft" because it uses elastomeric materials, most notably PDMS. Soft lithography is generally used to construct features measured on the micrometer to nanometer scale.

At LaNN, a soft lithography process has been finely tuned in order to realize high-fidelity replicas of several 3D nano-optical elements fabricated by electron beam lithography (EBL). Starting from the original masters, spiral phase plates (SPP), computer-generated holograms (CGH) and diffractive optical elements (DOE) have been precisely reproduced. The optical behavior of the fabricated replicas has been tested to be comparable to that of the original SPP, CGH and DOE masters.

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